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Fabrication and Magnetic Properties of Nonmagnetic Ion Implanted Magnetic Recording Films for Bit-Patterned Media
We have investigated the magnetic M-H loop characteristics of CoCrPt-SiO 2 perpendicular recording media as influenced by nonmagnetic ion implantations. We have also developed patterned media via ion implantation using a convenient polymer nanomask approach for local control of coercivity of magneti...
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Published in: | IEEE transactions on magnetics 2011-10, Vol.47 (10), p.2532-2535 |
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Main Authors: | , , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | We have investigated the magnetic M-H loop characteristics of CoCrPt-SiO 2 perpendicular recording media as influenced by nonmagnetic ion implantations. We have also developed patterned media via ion implantation using a convenient polymer nanomask approach for local control of coercivity of magnetically hard [Co/Pd] n multilayer film with a [Co 0.3 nm \Pd 0.8 nm] 8 /Pd 3 nm/Ta 3 nm layer structure. The CoCrPt-SiO 2 magnetic layer having perpendicular magnetic anisotropy is sputter deposited on a flat substrate. The [Co/Pd] n multilayer film with vertical magnetic anisotropy is deposited and the regions corresponding to the magnetic recording bit islands are coated with polymer islands using a nanoimprinting technique. Subsequent ion implantation allows patterned penetration of implanted ions into the [Co/Pd] n multilayer film, thus creating magnetically isolated bit island geometry while maintaining the overall flat geometry of the patterned media. |
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ISSN: | 0018-9464 1941-0069 |
DOI: | 10.1109/TMAG.2011.2158197 |