Fabrication and Magnetic Properties of Nonmagnetic Ion Implanted Magnetic Recording Films for Bit-Patterned Media

• Published in: IEEE transactions on magnetics 2011-10, Vol.47 (10), p.2532-2535
• Main Authors: Choi, Chulmin, Noh, Kunbae, Oh, Young, Kuru, Cihan, Hong, Daehoon, Chen, Li-Han, Liou, Sy-Hwang, Seong, Tae-Yeon, Jin, Sungho
• Format: Article
• Language: English
• Subjects: Applied sciences; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Ion implantation; Magnetic hysteresis; Magnetic multilayers; Materials science; Media; Metals. Metallurgy; Methods of deposition of films and coatings; film growth and epitaxy; nanolithography; Other surface treatments; Other topics in materials science; Perpendicular magnetic recording; Physics; Polymers; Production techniques; Surface treatment
• ISSN: 0018-9464; 1941-0069
• DOI: 10.1109/TMAG.2011.2158197

We have investigated the magnetic M-H loop characteristics of CoCrPt-SiO 2 perpendicular recording media as influenced by nonmagnetic ion implantations. We have also developed patterned media via ion implantation using a convenient polymer nanomask approach for local control of coercivity of magnetically hard [Co/Pd] n multilayer film with a [Co 0.3 nm \Pd 0.8 nm] 8 /Pd 3 nm/Ta 3 nm layer structure. The CoCrPt-SiO 2 magnetic layer having perpendicular magnetic anisotropy is sputter deposited on a flat substrate. The [Co/Pd] n multilayer film with vertical magnetic anisotropy is deposited and the regions corresponding to the magnetic recording bit islands are coated with polymer islands using a nanoimprinting technique. Subsequent ion implantation allows patterned penetration of implanted ions into the [Co/Pd] n multilayer film, thus creating magnetically isolated bit island geometry while maintaining the overall flat geometry of the patterned media.