3-D MEMS scanning system for dual-axis confocal microendoscopy

This paper describes a 3-D MEMS scanning system for 3.2mm-diameter dual-axis confocal (DAC) microendoscopes. Co-operation of a 2-D lateral scanner and a 1-D depth scanner enables fast 3-D microscopy over a volume that measures 340μm by 236μm by 286μm.

Saved in:
Bibliographic Details
Main Authors: Jae-Woong Jeong, Mandella, M. J., Kino, G. S., Contag, C. H., Solgaard, O.
Format: Conference Proceeding
Language:English
Subjects:
3-D imaging
depth scanner
dual-axis confocal microscopy
Micromechanical devices
micromirror
Microscopy
Mirrors
Optical device fabrication
Optical imaging
Relays
vertical combdrive actuator
Citations: Items that cite this one
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:This paper describes a 3-D MEMS scanning system for 3.2mm-diameter dual-axis confocal (DAC) microendoscopes. Co-operation of a 2-D lateral scanner and a 1-D depth scanner enables fast 3-D microscopy over a volume that measures 340μm by 236μm by 286μm.
ISSN:2160-5033
DOI:10.1109/OMEMS.2011.6031050