Selectively thinned stainless steel scanners through electrical discharge machining

In this work, a simple method using electric discharge machining (EDM) is exploited for three-dimensional fabrication of stainless steel scanners. Wire-EDM is used to define the device contours and sinker-EDM is used to selectively thin parts of the scanner. Fast and slow axis total optical scan ang...

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Bibliographic Details
Main Authors: Usta, B. K., Gokdel, Y. D., Mutlu, S., Yalcinkaya, A. D.
Format: Conference Proceeding
Language:English
Subjects:
Electrical discharge machining
Lithography
Machining
Mirrors
Optical device fabrication
optical scanners
Permanent magnets
Steel
Substrates
Online Access:Request full text
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Description
Summary:In this work, a simple method using electric discharge machining (EDM) is exploited for three-dimensional fabrication of stainless steel scanners. Wire-EDM is used to define the device contours and sinker-EDM is used to selectively thin parts of the scanner. Fast and slow axis total optical scan angles are measured as 1.6° at 10.875 kHz and 78° at 236 Hz, respectively.
ISSN:2160-5033
DOI:10.1109/OMEMS.2011.6031070