Thin film ZnO based bulk acoustic mode filters

We have used thin film ZnO bulk mode resonators on an acoustically reflecting solid glass substrate to produce a variety of filters in the 1-3 GHz frequency bands. Power handling is large (>2W). Overall filter dimensions are very small (/spl sim/1 mm), while lithography requirements are undemandi...

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Bibliographic Details
Main Authors: Seabury, C.W., Kobrin, P.H., Addison, R., Havens, D.P.
Format: Conference Proceeding
Language:English
Subjects:
Frequency
Glass
Inductors
Insertion loss
Lithography
Resonator filters
Solids
Substrates
Transistors
Zinc oxide
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Summary:We have used thin film ZnO bulk mode resonators on an acoustically reflecting solid glass substrate to produce a variety of filters in the 1-3 GHz frequency bands. Power handling is large (>2W). Overall filter dimensions are very small (/spl sim/1 mm), while lithography requirements are undemanding (>10 /spl mu/m). A range of ladder filters has been produced with an average rejection to insertion loss ratio of /spl sim/10. Monolithic inductors have also been used to improve characteristics over specified bands.
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.1997.604551