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Grating-coupler based low-loss optical interlayer coupling
Optical interlayer couplers with 2.8dB insertion loss and 48nm bandwidth were designed and demonstrated in a commercial 130nm SOI CMOS process. 10Gb/s transmission through an interlayer-coupled link showed a power penalty of
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Main Authors: | , , , , , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Citations: | Items that cite this one |
Online Access: | Request full text |
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Summary: | Optical interlayer couplers with 2.8dB insertion loss and 48nm bandwidth were designed and demonstrated in a commercial 130nm SOI CMOS process. 10Gb/s transmission through an interlayer-coupled link showed a power penalty of |
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ISSN: | 1949-2081 1949-209X |
DOI: | 10.1109/GROUP4.2011.6053824 |