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Grating-coupler based low-loss optical interlayer coupling

Optical interlayer couplers with 2.8dB insertion loss and 48nm bandwidth were designed and demonstrated in a commercial 130nm SOI CMOS process. 10Gb/s transmission through an interlayer-coupled link showed a power penalty of

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Bibliographic Details
Main Authors: Jin Yao, Xuezhe Zheng, Guoliang Li, Shubin, I., Thacker, H., Ying Luo, Raj, K., Cunningham, J. E., Krishnamoorthy, A. V.
Format: Conference Proceeding
Language:English
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Description
Summary:Optical interlayer couplers with 2.8dB insertion loss and 48nm bandwidth were designed and demonstrated in a commercial 130nm SOI CMOS process. 10Gb/s transmission through an interlayer-coupled link showed a power penalty of
ISSN:1949-2081
1949-209X
DOI:10.1109/GROUP4.2011.6053824