Mechanical characterization of neural electrodes based on PDMS-parylene C-PDMS sandwiched system

Manufacturing of neural electrodes based on metal foil and silicone rubber using a laser is a simple and promising method. A handicap of such electrode arrays is the mechanical robustness of the thin metal tracks that connect the electrode sites with the interconnection pads. Embedding of structured...

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Bibliographic Details
Main Authors: Henle, C., Hassler, C., Kohler, F., Schuettler, M., Stieglitz, T.
Format: Conference Proceeding
Language:English
Subjects:
Electrodes
Lasers
Materials
Platinum
Robustness
Rubber
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Summary:Manufacturing of neural electrodes based on metal foil and silicone rubber using a laser is a simple and promising method. A handicap of such electrode arrays is the mechanical robustness of the thin metal tracks that connect the electrode sites with the interconnection pads. Embedding of structured parylene C foil in silicone rubber turned out to be an interesting method to increase the robustness. Test samples with 12.5 μm thick platinum tracks and a 15 μm thick embedded and RIE-structured parylene C foil showed more than 800 % higher ultimate strength until breakage of the tracks. Different structured parylene C foil showed increasing robustness with increasing hole-spacing.
ISSN:1094-687X
1558-4615
2694-0604
DOI:10.1109/IEMBS.2011.6090142