Behavioural modelling of MEMS oscillators and phase noise simulation

MEMS oscillators offer interesting prospects in terms of performance. Behavioural modelling in Verilog-A and phase noise simulation can help improving the current performances. The proposed macro-model permits multi-physic simulations including mechanical, piezoelectric and electrical analytic descr...

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Bibliographic Details
Main Authors: Papin, G., Levy, R., Lissorgues, G., Poulichet, P.
Format: Conference Proceeding
Language:English
Subjects:
Hardware design languages
Integrated circuit modeling
Mathematical model
MEMS
oscillator
Phase noise
Resonant frequency
resonator
Transconductance
Verilog-A model
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Summary:MEMS oscillators offer interesting prospects in terms of performance. Behavioural modelling in Verilog-A and phase noise simulation can help improving the current performances. The proposed macro-model permits multi-physic simulations including mechanical, piezoelectric and electrical analytic descriptions. Phase noise analysis are then performed with this model and compared to the standard Leeson phase noise calculation.