A fully integrated circuit for MEMS vibrating gyroscope using standard 0.25um CMOS process

This paper presents an all-in-one fully integrated circuit solution for a vibrating micro-electromechanical gyroscope system using standard 0.25um 1P5M low voltage CMOS process. The analog parts of the system include a trans-impedance amplifier (TIA) with adaptive gain control (AGC) for the resonato...

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Bibliographic Details
Main Authors: Sheng-Ren Chiu, Chung-Yang Sue, Lu-Pu Liao, Li-Tao Teng, Yu-Wen Hsu, Yan-Kuin Su
Format: Conference Proceeding
Language:English
Subjects:
Application specific integrated circuits
Capacitors
Fingers
Gyroscopes
Micromechanical devices
Modulation
Sensors
Online Access:Request full text
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Summary:This paper presents an all-in-one fully integrated circuit solution for a vibrating micro-electromechanical gyroscope system using standard 0.25um 1P5M low voltage CMOS process. The analog parts of the system include a trans-impedance amplifier (TIA) with adaptive gain control (AGC) for the resonator driving loop, a sigma-delta modulator with gain/offset trimming function for the Coriolis signal read-out and a modified all PMOS charge pump for the high DC voltage. The digital signal processing parts include a trimming/control logic circuit and an I2C interface. SOG-bulk micromachining and deep reactive ion etching (DRIE) are adopted to fabricate the gyroscope sensor element with high aspect-ratio sensing structure and high yield. The experimental results indicate that the noise floor achieves 0.051° / s/ √Hz and the scale factor is 7mV/ °/s of the proposed two chip MEMS gyroscope system.
ISSN:2150-5934
2150-5942
DOI:10.1109/IMPACT.2011.6117258