Bake plate control using a robust multiplexed model predictive control (RMMPC)

This paper proposes a robust multiplexed model predictive control (MMPC) for a bake plate control system. The bake plate is a multi-inputs multi-outputs (MIMO) system which is required to have uniform temperature. In bake plate sytem, the controller must be able to reduce the disturbances caused whe...

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Bibliographic Details
Main Authors: Joelianto, E., Prasetia, I. G.
Format: Conference Proceeding
Language:English
Subjects:
bake plate
disturbance attenuation
multiplexed model predictive control (MMPC)
robust optimization
Robustness
Online Access:Request full text
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Summary:This paper proposes a robust multiplexed model predictive control (MMPC) for a bake plate control system. The bake plate is a multi-inputs multi-outputs (MIMO) system which is required to have uniform temperature. In bake plate sytem, the controller must be able to reduce the disturbances caused when placing a cold wafer inside. Results show that the proposed robust MMPC can outperform in attenuating disturbance compare with the MMPC and the standard MPC.
DOI:10.1109/ICA.2011.6130151