Surface-micromachined diffraction gratings for scanning spectroscopic applications

We report the design and fabrication of an actuated diffraction grating using a foundry (Multi-User MEMS ProcesS, or MUMPS, at MCNC) surface-micromachining process. Rectangular gratings with 4 /spl mu/m period and 0.75 /spl mu/m depth are produced on a 500/spl times/1000 /spl mu/m polysilicon plate,...

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Bibliographic Details
Main Authors: Meng-Hsiung Kiang, Nee, J.T., Lau, K.Y., Muller, R.S.
Format: Conference Proceeding
Language:English
Subjects:
Actuators
Bars
Diffraction gratings
Electrostatics
Etching
Fabrication
Fingers
Optical surface waves
Silicon
Spectroscopy
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Summary:We report the design and fabrication of an actuated diffraction grating using a foundry (Multi-User MEMS ProcesS, or MUMPS, at MCNC) surface-micromachining process. Rectangular gratings with 4 /spl mu/m period and 0.75 /spl mu/m depth are produced on a 500/spl times/1000 /spl mu/m polysilicon plate, which is mounted on torsion bars, and actuated by an electrostatic combdrive. Operated as a first-order reflective grating, it can be used to build an integrated scanning microspectrometer with a resolving power of 250, or, as a grating demultiplexer for multichannel wavelength-switching networks.
DOI:10.1109/SENSOR.1997.613654