A chemical micro analysis system for measurement of pressure, flow rate, temperature, conductivity, UV-absorption and fluorescence

A miniaturized multisensor system, intended for simultaneous measurement of six different parameters in a liquid flow, is presented. The system combines a multisensor chip, a micromachined flow-through cell and optical fiber interfaces to monitor pressure, flow rate, temperature, conductivity, UV-ab...

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Bibliographic Details
Main Authors: Norlin, P., Ohman, O., Ekstrom, B., Forssen, L.
Format: Conference Proceeding
Language:English
Subjects:
Chemical analysis
Fluid flow
Fluid flow measurement
Image motion analysis
Monitoring
Multisensor systems
Optical fibers
Pressure measurement
Semiconductor device measurement
Temperature sensors
Online Access:Request full text
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Description
Summary:A miniaturized multisensor system, intended for simultaneous measurement of six different parameters in a liquid flow, is presented. The system combines a multisensor chip, a micromachined flow-through cell and optical fiber interfaces to monitor pressure, flow rate, temperature, conductivity, UV-absorption and fluorescence. Measurement results show that the performance of the system can compete with that of conventional stand-alone sensors.
DOI:10.1109/SENSOR.1997.613698