A bulk micromachined humidity sensor based on porous silicon

This paper reports on the development of a micromachined membrane humidity sensor. The sensor utilises the capacitance technique to measure relative humidity. The membrane, which acts as the dielectric, is made porous using a standard anodisation technique. The advantages of this type of constructio...

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Bibliographic Details
Main Authors: O'Halloran, G.M., Sarro, P.M., Groeneweg, J., Trimp, P.J., French, P.J.
Format: Conference Proceeding
Language:English
Subjects:
Biomembranes
Capacitance
Capacitive sensors
Dielectric materials
Electrodes
Gold
Humidity
Laboratories
Resistors
Silicon
Online Access:Request full text
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Summary:This paper reports on the development of a micromachined membrane humidity sensor. The sensor utilises the capacitance technique to measure relative humidity. The membrane, which acts as the dielectric, is made porous using a standard anodisation technique. The advantages of this type of construction compared to the standard bulk-type sensor are outlined. Also, a heating resistor is incorporated underneath the membrane. This acts as a reset to the device by driving out excess moisture.
DOI:10.1109/SENSOR.1997.613712