An n- \hbox /i-Diamond/p-Diamond Diode With Nanotip Structure for High-Temperature CO Sensing Applications

The Pd/n-SnO x /i-diamond/p-diamond diodes prepared by field-enhanced hot-wire CVD (HWCVD) (FEHWCVD) system on a silicon substrate with nanotip structures are studied systematically. Both the nanotip structure and the better film quality deposited by the FEHWCVD lead the developed p-i-n diamond diod...

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Published in:IEEE transactions on electron devices 2012-06, Vol.59 (6), p.1786-1791
Main Authors: Juang, Feng-Renn, Chiu, Hung-Yu, Fang, Yean-Kuen, Cho, Kao-Hsien, Chen, You-Chi
Format: Article
Language:English
Subjects:
CO sensor
diamond
Diamond-like carbon
hbox{SnO}_{x}
Nanostructures
p-i-n diode
P-i-n diodes
Sensitivity
Sensors
Silicon
Substrates
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cited_by cdi_FETCH-LOGICAL-c1085-ccd5723ace7b9d73235d675f9d5d1296bc66e15bc8b9bf65fde4751a7648a7a33
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container_issue 6
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container_title IEEE transactions on electron devices
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creator Juang, Feng-Renn
Chiu, Hung-Yu
Fang, Yean-Kuen
Cho, Kao-Hsien
Chen, You-Chi
description The Pd/n-SnO x /i-diamond/p-diamond diodes prepared by field-enhanced hot-wire CVD (HWCVD) (FEHWCVD) system on a silicon substrate with nanotip structures are studied systematically. Both the nanotip structure and the better film quality deposited by the FEHWCVD lead the developed p-i-n diamond diode to have a high relative sensitivity ratio of ~ 91% to 100-ppm-carbon monoxide (CO)-gas ambient. The sensitivity ratio is better than 79% compared to the one without the nanotip and prepared by the conventional HWCVD. Thus, the developed p-i-n diamond diode has better potential for high-temperature CO sensing applications.
doi_str_mv 10.1109/TED.2012.2191408
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source IEEE Electronic Library (IEL) Journals
subjects CO sensor
diamond
Diamond-like carbon
hbox{SnO}_{x}
Nanostructures
p-i-n diode
P-i-n diodes
Sensitivity
Sensors
Silicon
Substrates
title An n- \hbox /i-Diamond/p-Diamond Diode With Nanotip Structure for High-Temperature CO Sensing Applications
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