Design optimization of a limited angle voice coil actuator for use in a wire bonding application

The design optimization of a limited angle voice coil actuator is described in this paper. The actuator's function is to position an ultrasonic transducer that will produce gold interconnections, with wire, between semiconductor devices and substrates. The tip of the transducer carries a capill...

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Bibliographic Details
Main Authors: Widdowson, G.P., Kuah, T.H., Vath, C.J.
Format: Conference Proceeding
Language:English
Subjects:
Acceleration
Actuators
Analytical models
Coils
Design optimization
Gold
Semiconductor devices
Substrates
Ultrasonic transducers
Wire
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Description
Summary:The design optimization of a limited angle voice coil actuator is described in this paper. The actuator's function is to position an ultrasonic transducer that will produce gold interconnections, with wire, between semiconductor devices and substrates. The tip of the transducer carries a capillary that must accelerate in excess of 50G, yet still control the touchdown velocity to within 5 mm/s. The actuator is designed to maximize the force/mass while the moving coil must balance the inertia of the rotary system around the pivot spring bearing. A simulated annealing based constrained optimization technique is employed in the design, along with magnetic lumped parameter and finite element analyses which are used for the motor simulation.
DOI:10.1109/PEDS.1997.618740