An extended de-embedding method for on-wafer components

On-wafer de-embedding method has been proposed for different method up to millimeter-wave (mm-wave) frequency range. An extended de-embedding method for on wafer devices up to 65 GHz is proposed. Using Vertical connection of L-2L (VL2L) is presented in this paper, with a calibrated loss tangent valu...

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Bibliographic Details
Main Authors: Yu-Ling Lin, Hsiao-Tsung Yen, Ho-Hsiang Chen, Chewn-Pu Jou, Chin-Wei Kuo, Min-Che Jeng, Fu-Lung Hsuch, Chih-Hua Hsiao, Guo-Wei Huang
Format: Conference Proceeding
Language:English
Subjects:
Calibration
CMOS millimeter wave integrated circuit
L-2L de-embedding
on-wafer microwave measurement
passive components
Scattering parameters measurement
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Summary:On-wafer de-embedding method has been proposed for different method up to millimeter-wave (mm-wave) frequency range. An extended de-embedding method for on wafer devices up to 65 GHz is proposed. Using Vertical connection of L-2L (VL2L) is presented in this paper, with a calibrated loss tangent value in mm-wave. It shows significant good and accurate results for on-wafer modeling up to 65 GHz. VL2L are considered to be a good method for different kind of devices, such as capacitors. Also, the results by different CMOS process and EM simulation are with good agreement.
ISSN:1071-9032
2158-1029
DOI:10.1109/ICMTS.2012.6190638