The MEMS 5-in-1 Reference Materials (RM 8096 and 8097)

The Microelectromechanical Systems (MEMS) 5-in-1 Reference Material (RM) contains test structures for five standard test methods on one test chip, so companies can compare their in-house measurements taken on the RM with National Institute of Standards and Technology (NIST) measurements, thereby val...

Full description

Saved in:
Bibliographic Details
Main Authors: Cassard, J., Geist, J., Gaitan, M., Seiler, D. G.
Format: Conference Proceeding
Language:English
Subjects:
Micromechanical devices
Microscopy
Semiconductor device measurement
Strain
Stress
Thickness measurement
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The Microelectromechanical Systems (MEMS) 5-in-1 Reference Material (RM) contains test structures for five standard test methods on one test chip, so companies can compare their in-house measurements taken on the RM with National Institute of Standards and Technology (NIST) measurements, thereby validating their use of the documentary standard test methods. Examples of NIST reference values are given for an RM 8096 monitor chip used at NIST for stability studies.
ISSN:1071-9032
2158-1029
DOI:10.1109/ICMTS.2012.6190649