Test Structures for Characterizing the Integration of EWOD and SAW Technologies for Microfluidics

This paper presents details of the design and fabrication of test structures specifically designed for the characterization of two distinct digital microfluidic technologies: electro-wetting on dielectric (EWOD) and surface acoustic wave (SAW). A test chip has been fabricated that includes structure...

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Bibliographic Details
Published in:IEEE transactions on semiconductor manufacturing 2012-08, Vol.25 (3), p.323-330
Main Authors: Yifan Li, Fu, R. Y., Winters, D., Flynn, B. W., Parkes, B., Brodie, D. S., Yufei Liu, Terry, J., Haworth, L. I., Bunting, A. S., Stevenson, J. T. M., Smith, S., Mackay, C. L., Langridge-Smith, P. R. R., Stokes, A. A., Walton, A. J.
Format: Article
Language:English
Subjects:
Acoustic wave devices, piezoelectric and piezoresistive devices
Applied fluid mechanics
Applied sciences
Chip formation
Contact angle
Design
Devices
Dielectrics
Digital
Droplets
electro-wetting on dielectric (EWOD)
Electrodes
Electronics
Exact sciences and technology
Fabrication
Fluid dynamics
Fluidics
Fundamental areas of phenomenology (including applications)
integration
Microfluidics
Performance evaluation
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Semiconductors
Substrates
surface acoustic wave (SAW)
Surface acoustic wave devices
Surface acoustic waves
test structure
Testing, measurement, noise and reliability
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Summary:This paper presents details of the design and fabrication of test structures specifically designed for the characterization of two distinct digital microfluidic technologies: electro-wetting on dielectric (EWOD) and surface acoustic wave (SAW). A test chip has been fabricated that includes structures with a wide range of dimensions and provides the capability to characterize enhanced droplet manipulation, as well as other integrated functions. The EWOD and SAW devices have been separately characterized first of all to determine whether integration of the technologies affects their individual performance, including device lifetime evaluation. Microfluidic functions have then been demonstrated, including combined EWOD/SAW functions. In particular, this paper details the use of EWOD to anchor droplets, while SAW excitation is applied to perform mixing. The relationship between test structure designs and the droplets anchoring performance has been studied.
ISSN:0894-6507
1558-2345
DOI:10.1109/TSM.2012.2202770