Optimizing product yield using manufacturing defect weights

Yield of 45nm products can be optimized by adjusting how the router is run. While forcing wiring to upper levels adds wire length and increases the number of vias, sensitivity to random defects is reduced. Wire spreading does not improve yield for 45nm products.

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Bibliographic Details
Main Authors: Bickford, J. P., Hibbeler, J. D., Mueller, D., Peyer, Sven, Kumar, Vasanth S.
Format: Conference Proceeding
Language:English
Subjects:
Design for Manufacturing (DfM)
Manufacturability
Metals
Optimization
Product design
Routing
Sensitivity
Wires
Wiring
Yield
Online Access:Request full text
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Description
Summary:Yield of 45nm products can be optimized by adjusting how the router is run. While forcing wiring to upper levels adds wire length and increases the number of vias, sensitivity to random defects is reduced. Wire spreading does not improve yield for 45nm products.
ISSN:1078-8743
2376-6697
DOI:10.1109/ASMC.2012.6212861