Experimental setup for investigation of the pseudospark discharge as applied to generation of EUV radiation

The paper describes the main features of the experimental installation for investigation of a high current pulsed gas discharge, which burns in typical conditions of EUV source operation.

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Bibliographic Details
Main Authors: Korolev, Yu. D., Datsko, I. M., Frants, O. B., Geyman, V. G., Ivashov, R. V., Landl, N. V., Shemyakin, I. A.
Format: Conference Proceeding
Language:English
Citations: Items that cite this one
Online Access:Request full text
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Description
Summary:The paper describes the main features of the experimental installation for investigation of a high current pulsed gas discharge, which burns in typical conditions of EUV source operation.
DOI:10.1063/1.1531303