Influence of deposition conditions on characteristics of thin-film coatings obtained using high-power ion beams

The films of titanium and carbon deposited onto silicon and α-Fe substrates using high-power ion beams were investigated. The adhesion strength and plasticity of coatings obtained at different deposition conditions have been studied. It has been found that the adhesion strength increases with increa...

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Bibliographic Details
Main Authors: Struts, V. K., Matvienko, V. M., Ryabchikov, A. I., Petrov, A. V., Shlapakovski, A. S.
Format: Conference Proceeding
Language:English
Subjects:
Adhesives
Focusing
Iron
Silicon
Substrates
Thickness measurement
Online Access:Request full text
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Summary:The films of titanium and carbon deposited onto silicon and α-Fe substrates using high-power ion beams were investigated. The adhesion strength and plasticity of coatings obtained at different deposition conditions have been studied. It has been found that the adhesion strength increases with increasing distance between the substrate and ablated target and with decreasing film thickness determined by a number of accelerator shots. Characteristics of different coatings are compared.