Deep-UV Lithographic Approaches For 1 Gb DRAM

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Bibliographic Details
Main Authors: Wong, Farrell, Ferguson, Lut, Mansfield, Molless, Neisser, Nunes, Samuels, Thomas
Format: Conference Proceeding
Language:English
Subjects:
Arrays
Lighting
Lithography
Optimization
Random access memory
Resists
Online Access:Request full text
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DOI:10.1109/VLSIT.1997.623731