Near-infrared photon emission spectroscopy of a 45 nm SOI ring oscillator

This paper presents, for the first time, near-infrared spectral photon emission measurements of a ring oscillator in IBM's 45 nm SOI process technology. The setup employs a cryogenically cooled MCT camera and different band-pass filters with a very broad spectral range from 850-2100 nm. The pap...

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Bibliographic Details
Main Authors: Kindereit, U., Weger, A. J., Stellari, F., Peilin Song, Deslandes, H., Lundquist, T., Sabbineni, P.
Format: Conference Proceeding
Language:English
Subjects:
Band pass filters
Cameras
failure analysis
HgCdTe
MCT
PEM
Photon emission microscopy
Photonics
red shift
SOI
spectroscopy
Switches
Temperature measurement
Voltage measurement
Wavelength measurement
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Summary:This paper presents, for the first time, near-infrared spectral photon emission measurements of a ring oscillator in IBM's 45 nm SOI process technology. The setup employs a cryogenically cooled MCT camera and different band-pass filters with a very broad spectral range from 850-2100 nm. The paper presents the spectral data, discusses the thermal contributions, and analyzes its impact for selecting appropriate detectors and tools for time-resolved measurements in present and future technology nodes.
ISSN:1541-7026
1938-1891
DOI:10.1109/IRPS.2012.6241783