Cross-sectional dilation mode resonator with very high electromechanical coupling up to 10% using AlN

For the first time in the development of piezoelectric micromechanical resonators, this paper presents a new class of cross-sectional dilation mode resonators (XDMR) that achieve unprecedentedly high electromechanical coupling constant: k t 2 up to 10% for aluminum nitride (AlN) based resonators and...

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Bibliographic Details
Main Authors: Chengjie Zuo, Yun, C. H., Stephanou, P. J., Sang-June Park, Lo, C.-S T., Mikulka, R., Lan, J.-H J., Velez, M. F., Shenoy, R. V., Jonghae Kim, Nowak, M. M.
Format: Conference Proceeding
Language:English
Subjects:
Film bulk acoustic resonators
Finite element methods
Geometry
Resonant frequency
Shape
Solid modeling
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Summary:For the first time in the development of piezoelectric micromechanical resonators, this paper presents a new class of cross-sectional dilation mode resonators (XDMR) that achieve unprecedentedly high electromechanical coupling constant: k t 2 up to 10% for aluminum nitride (AlN) based resonators and 19% for zinc oxide (ZnO) based resonators. Detailed discussions on the geometry design, FEM simulation, and process challenge are provided in this paper to give insight on this novel high-k t 2 piezoelectric resonator technology and, more importantly, guide the future development of mechanical resonators with coherent 2D/3D mode shapes.
ISSN:2327-1914
DOI:10.1109/FCS.2012.6243598