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Microleverage DETF Aluminum Nitride resonating accelerometer
In this work, we present a novel microleverage Double Ended Tuning Fork (DETF) resonant accelerometer made of thin film piezoelectric Aluminum Nitride (AlN). The development and characterization of this novel design is discussed through a Finite Element Analysis (FEA) and experimentally demonstrated...
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Main Authors: | , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | In this work, we present a novel microleverage Double Ended Tuning Fork (DETF) resonant accelerometer made of thin film piezoelectric Aluminum Nitride (AlN). The development and characterization of this novel design is discussed through a Finite Element Analysis (FEA) and experimentally demonstrated. The entire accelerometer structure is made of 2 μm of highly c-axis oriented piezoelectric AlN with 100 nm platinum as top and bottom electrode. The preliminary characterization of the accelerometer was performed in a vacuum chamber at a pressure of 4 Torr and achieved a sensitivity of 18.1 Hz/g (i.e. 54 ppm/g) along the sensing axis and 0.1 Hz/g along the cross axis. |
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ISSN: | 2327-1914 |
DOI: | 10.1109/FCS.2012.6243634 |