Measuring the thickness of few-layer graphene by laser scanning microscopy

This paper demonstrates laser scanning microscopy (LSM) as a viable means for quantitative and accurate measurement of reflectivity of microscopic objects/samples with diffraction-limited spatial resolution. As an example, the LSM technique along with the quantized nature of reflectivity in graphene...

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Bibliographic Details
Main Authors: Ghamsari, B. G., Tosado, J., Zhuravel, A. P., Yamamoto, M., Lenski, D. R., Jinglei Ping, Fuhrer, M. S., Anlage, S. M.
Format: Conference Proceeding
Language:English
Subjects:
Diffraction Limited Resolution
Few-Layer Graphene
Fresnel Reflection
Laser Scanning Microscopy
Laser theory
Masers
Materials
Measurement by laser beam
Microscopy
Optical imaging
Optical microscopy
Optical Reflectivity Contrast
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Summary:This paper demonstrates laser scanning microscopy (LSM) as a viable means for quantitative and accurate measurement of reflectivity of microscopic objects/samples with diffraction-limited spatial resolution. As an example, the LSM technique along with the quantized nature of reflectivity in graphene are utilized to identify and count the number of layers of graphene few-layer flakes based on their thickness-dependent reflectivity contrast. The physical mechanism of LSM reflectivity and the associated data analysis techniques are concisely presented.
ISSN:0589-1485
2160-0171
DOI:10.1109/CPEM.2012.6251000