Design, simulation & modelling of MEMS based comb-drive tunneling effect gyroscope

The principle of electron force microscopy is a well-known phenomenon of sensing in high sensitive MEMS based accelerometers & AFM. We intend to extend this concept towards development of a gyroscope, based on the fact that gyroscope sensors are accelerometers, but with a drive mode. In this pap...

Full description

Saved in:
Bibliographic Details
Main Authors: Hazarika, B., Afzulpurkar, N., Punyasai, C., Kumar Das, D.
Format: Conference Proceeding
Language:English
Subjects:
AFM
Coriolis acceleration
Damping
Electrodes
Gyroscopes
Mathematical model
Micromechanical devices
Sensors
Tunneling
Tunneling current
vibratory gyroscope
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The principle of electron force microscopy is a well-known phenomenon of sensing in high sensitive MEMS based accelerometers & AFM. We intend to extend this concept towards development of a gyroscope, based on the fact that gyroscope sensors are accelerometers, but with a drive mode. In this paper we present a design of a MEMS based tunneling gyroscope with electron tunneling a sense mechanism. The important parameters required for modeling of the single axis gyroscope is like spring constant, damping coefficient and resonance frequencies are calculated using FEA analysis using COVENTORWARE. A SIMULINK based model is used to examine the response behavior of the model.
DOI:10.1109/ECTICon.2012.6254223