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Exploiting photosensitive As2S3 chalcogenide glass in photonic integrated circuits

In this contribution we present a new and efficient technique for post-fabrication trimming of chalcogenide (ChG) based photonic integrated circuits (PICs). The technique exploits the high photosensitivity of As 2 S 3 glass to visible light radiation in order to induce a variation in the refractive...

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Bibliographic Details
Main Authors: Grillanda, S., Canciamilla, A., Morichetti, F., Hu, J., Raghunathan, V., Singh, V., Agarwal, A., Kimerling, L. C., Melloni, A.
Format: Conference Proceeding
Language:English
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Summary:In this contribution we present a new and efficient technique for post-fabrication trimming of chalcogenide (ChG) based photonic integrated circuits (PICs). The technique exploits the high photosensitivity of As 2 S 3 glass to visible light radiation in order to induce a variation in the refractive index of the material, and therefore in the optical properties of ChG-based devices. The trimming technique enables not only to compensate for fabrication tolerances and restore desired functionalities, but also to provide a tool for the reconfiguration of photonic circuits. We demonstrate the trimming of PICs employing As 2 S 3 core waveguides and As 2 S 3 -assisted silicon waveguides. Finally, to further show the wide versatility of this approach, we apply the technique to trim the response of As 3 S 3 silicon waveguides covered with an additional polymer cladding layer, demonstrating simultaneous athermal operation and trimming functionality.
ISSN:2162-7339
DOI:10.1109/ICTON.2012.6254471