High performance miniaturized NEMS sensors Toward co-integration with CMOS?

In this paper, we will present some possible emerging applications for Nano-Electro-Mechanical Systems (NEMS) and the interest of their co-integration with CMOS. We will compare some integration schemes and present mass sensing as a possible emerging application. In particular, experimental results...

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Bibliographic Details
Main Authors: Ernst, T., Arcamone, J., Philippe, J., Martin, O., Ollier, E., Batude, P., Gouttenoire, V., Marcoux, C., Ricoul, F., Dupre, C., Colinet, E., Rozeau, O., Billiot, G., Duraffourg, L.
Format: Conference Proceeding
Language:English
Subjects:
Application specific integrated circuits
CMOS integrated circuits
Detectors
Europe
Facsimile
Nanoelectromechanical systems
Voltage measurement
Online Access:Request full text
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Summary:In this paper, we will present some possible emerging applications for Nano-Electro-Mechanical Systems (NEMS) and the interest of their co-integration with CMOS. We will compare some integration schemes and present mass sensing as a possible emerging application. In particular, experimental results on complex gas measurements with NEMS will be introduced. We will show that multi-physics simulations and compact modelling of NEMS components (including chemical and physical effects) can be efficiently used in circuit simulations standard tools for such system optimization.
ISSN:1548-3770
2640-6853
DOI:10.1109/DRC.2012.6256937