Resonant PZT MEMS Scanner for High-Resolution Displays

A resonant piezoelectric scanner is developed for high-resolution laser-scanning displays. A novel actuation scheme combines the principle of mechanical amplification with lead zirconate titanate (PZT) thin-film actuation. Sinusoidal actuation with 24 V at the mechanical resonance frequency of 40 kH...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2012-12, Vol.21 (6), p.1303-1310
Main Authors: Baran, U., Brown, D., Holmstrom, S., Balma, D., Davis, W. O., Muralt, P., Urey, H.
Format: Article
Language:English
Subjects:
Actuators
Electrodes
Exact sciences and technology
High-frequency laser beam scanning
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
lead zirconate titanate (PZT) thin-film-actuated
Mechanical instruments, equipment and techniques
MEMS mirror
microelectromechanical systems (MEMS)
Micromechanical devices
Micromechanical devices and systems
Mirrors
Physics
Resonant frequency
resonant scanner
Silicon
Stress
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Summary:A resonant piezoelectric scanner is developed for high-resolution laser-scanning displays. A novel actuation scheme combines the principle of mechanical amplification with lead zirconate titanate (PZT) thin-film actuation. Sinusoidal actuation with 24 V at the mechanical resonance frequency of 40 kHz provides an optical scan angle of 38.5° for the 1.4-mm-wide mirror. This scanner is a significant step toward achieving full-high-definition resolution (1920 × 1080 pixels) in mobile laser projectors without the use of vacuum packaging. The reported piezoscanner requires no bulky components and consumes
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2012.2209405