Fabrication of DLC-Coated Field Emitter Triode Using Aluminum Parting Layer

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Bibliographic Details
Main Authors: Sanjo Lee, Sunup Lee, Jeon, D., Lee, K.R., Byeong Kwon Ju, Myung Hwan Oh
Format: Conference Proceeding
Language:English
Subjects:
Aluminum
Argon
Coatings
Fabrication
Insulation
Leakage current
Semiconductor thin films
Silicon
Substrates
Thermal conductivity
Online Access:Request full text
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DOI:10.1109/IVMC.1997.627600