Fabrication of DLC-Coated Field Emitter Triode Using Aluminum Parting Layer

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Main Authors: Sanjo Lee, Sunup Lee, Jeon, D., Lee, K.R., Byeong Kwon Ju, Myung Hwan Oh
Format: Conference Proceeding
Language:English
Subjects:
Aluminum
Argon
Coatings
Fabrication
Insulation
Leakage current
Semiconductor thin films
Silicon
Substrates
Thermal conductivity
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container_end_page 384
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container_start_page 381
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creator Sanjo Lee
Sunup Lee
Jeon, D.
Lee, K.R.
Byeong Kwon Ju
Myung Hwan Oh
description
doi_str_mv 10.1109/IVMC.1997.627600
format conference_proceeding
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identifier ISBN: 0780337867
ispartof 10th International Conference on Vacuum Microelectronics, 1997, p.381-384
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language eng
recordid cdi_ieee_primary_627600
source IEEE Electronic Library (IEL) Conference Proceedings
subjects Aluminum
Argon
Coatings
Fabrication
Insulation
Leakage current
Semiconductor thin films
Silicon
Substrates
Thermal conductivity
title Fabrication of DLC-Coated Field Emitter Triode Using Aluminum Parting Layer
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