Field Electron Emission From Silicon Tip Arrays Coated With Nitrogen Doped DLC Films

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Bibliographic Details
Main Authors: Litovchenko, V.G., Evtukh, A.A., Klyui, N.I., Kudzinovski, S.Yu, Marchenko, R.I., Semenovich, V.A.
Format: Conference Proceeding
Language:English
Subjects:
Chemicals
Conductive films
Diamond-like carbon
Electron emission
Nitrogen
Oxidation
Semiconductor films
Silicon
Thermal conductivity
Voltage
Online Access:Request full text
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DOI:10.1109/IVMC.1997.627602