Fabrication And Characterization Of Laser Produced Silicon Field Emission Arrays

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Bibliographic Details
Main Authors: Evtukh, A.A., Kaganovich, E.B., Litovchenko, V.G., Marchenko, R.I., Manoilov, E.G., Svechnikov, S.V.
Format: Conference Proceeding
Language:English
Subjects:
Etching
Gas lasers
Lithography
Optical arrays
Optical device fabrication
Optical pulses
Pulsed laser deposition
Semiconductor laser arrays
Silicon
Surface emitting lasers
Online Access:Request full text
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DOI:10.1109/IVMC.1997.627614