Anodic Alumina: A Promising Constructional Material For Vacuum And Semiconductor Microelectronics

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Bibliographic Details
Main Authors: Mukhurov, N.I., Efremov, G.I., Kotova, I.F.
Format: Conference Proceeding
Language:English
Subjects:
Aluminum
Amorphous materials
Building materials
Ceramics
Glass
Microelectronics
Microwave devices
Semiconductor materials
Substrates
Temperature
Online Access:Request full text
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DOI:10.1109/IVMC.1997.627662