Boron-doped zinc oxide thin films fabricated by ultrasonic spray pyrolysis

Boron doping on the structural, optical and electrical properties in BZO films fabricated by spray pyrolysis were investigated. The carrier concentration of ~10 19 cm -3 and optical transmittance about 90% in the infrared region was achieved.

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Bibliographic Details
Main Authors: Shao-Yi Lee, Wen-How Lan, Wei-Min Chao, Chun-Wei Tsai, Ming-Chang Shih, Yi-Da Wu, Yi-Chun Chou, Yu-Ting Hsu
Format: Conference Proceeding
Language:English
Subjects:
Acoustics
Boron
Doping
Ions
Optical films
Zinc oxide
Online Access:Request full text
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Description
Summary:Boron doping on the structural, optical and electrical properties in BZO films fabricated by spray pyrolysis were investigated. The carrier concentration of ~10 19 cm -3 and optical transmittance about 90% in the infrared region was achieved.
ISSN:2166-8884
2166-8892
DOI:10.1109/OECC.2012.6276781