On the rule of thumb for flipping the dispersion relation in BAW devices

High-performance solidly mounted bulk acoustic wave resonators (SMRs) can be obtained by employing frame region, if these exhibit type I dispersion. The commonly used piezoelectric material Aluminum Nitride is a type II material, for which type I dispersion can be enforced by increasing the top low-...

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Bibliographic Details
Main Authors: Jose, S., Hueting, R. J. E., Jansman, A. B. M.
Format: Conference Proceeding
Language:English
Subjects:
Acoustics
Aluminum Nitride
Bulk Acoustic Wave
Dispersion
rule of thumb
SMR
Thickness shear resonance
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Summary:High-performance solidly mounted bulk acoustic wave resonators (SMRs) can be obtained by employing frame region, if these exhibit type I dispersion. The commonly used piezoelectric material Aluminum Nitride is a type II material, for which type I dispersion can be enforced by increasing the top low-acoustic-impedance (silicon dioxide) layer thickness of the mirror. However a criterion for flipping was not investigated. In this work we propose a rule of thumb for flipping dispersion curves, applicable for FBARs and SMRs.
ISSN:1051-0117
DOI:10.1109/ULTSYM.2011.0427