Femtosecond infrared laser annealing of ferroelectric PZT films on a metal substrate

Ti-sapphire femtosecond laser was utilized to crystallize Pb(Zr 0,54 , Ti 0,46 )O 3 (PZT) film on platinized silicon substrate. Second harmonic generation was used to in-situ monitor of the annealing process and to confirm a non-centrosymmetric perovskite ferroelectric phase of the irradiated area....

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Bibliographic Details
Main Authors: Firsova, N. Y., Mishina, E. D., Senkevich, S. V., Pronin, I. P., Bdikin, I. K., Kholkin, A. L.
Format: Conference Proceeding
Language:English
Subjects:
Annealing
femtosecond laser annealing
ferroelectric
Frequency conversion
Lasers
Measurement by laser beam
piezoelectric
Raman scattering
second harmonic generation
Sol-gel
Substrates
thin films
Ultrafast electronics
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Summary:Ti-sapphire femtosecond laser was utilized to crystallize Pb(Zr 0,54 , Ti 0,46 )O 3 (PZT) film on platinized silicon substrate. Second harmonic generation was used to in-situ monitor of the annealing process and to confirm a non-centrosymmetric perovskite ferroelectric phase of the irradiated area. Piezo-force microscopy technique allowed us to investigate local polarization properties of annealed areas.
ISSN:1099-4734
2375-0448
DOI:10.1109/ISAF.2012.6297852