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Considerations for the design of an SRAM with SOI technology
A silicon-on-insulator process that has a thin silicon film and source/drain junctions driven to the underlying insulator and that provides significant advantages for fabrication of an SRAM for space applications, is presented. The advantages result primarily from a reduced collection volume for ups...
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Published in: | IEEE circuits and devices magazine 1987-11, Vol.3 (6), p.8-10 |
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Main Author: | |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that cite this one |
Online Access: | Get full text |
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Summary: | A silicon-on-insulator process that has a thin silicon film and source/drain junctions driven to the underlying insulator and that provides significant advantages for fabrication of an SRAM for space applications, is presented. The advantages result primarily from a reduced collection volume for upset from an ionizing particle and the possibility of fitting larger devices in a memory-cell area limited by interconnection pitch. The reduced junction capacitance would also give an SRAM fabricated with such a process an advantage for the general high-performance SRAM market. |
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ISSN: | 8755-3996 1558-1888 |
DOI: | 10.1109/MCD.1987.6323173 |