Stamp printing of silicon nanomembrane based flexible photonic devices

We demonstrate for the first time stamp printing of silicon nanomembrane based photonic devices onto flexible substrate utilizing protection layer and suspended configuration. The propagation loss of the transferred waveguide is ~1.1dB/cm.

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Bibliographic Details
Main Authors: Xiaochuan Xu, Subbaraman, H., Hosseini, A., Kwong, D., Che-Yun Lin, Chen, R. T.
Format: Conference Proceeding
Language:English
Subjects:
Etching
Loss measurement
Optical waveguides
Photonics
Printing
Silicon
Substrates
Online Access:Request full text
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Description
Summary:We demonstrate for the first time stamp printing of silicon nanomembrane based photonic devices onto flexible substrate utilizing protection layer and suspended configuration. The propagation loss of the transferred waveguide is ~1.1dB/cm.
ISSN:2160-8989
2160-9004