A platform for on-chip silica optomechanical oscillators with integrated waveguides

We present a new phosphosilicate glass photonic integrated circuit platform for optomechanical systems. Wafer-scale reflow enables high-Q (1.5×10 6 ) resonators and closely-spaced (250nm) waveguides. Optomechanical resonance (71.9MHz) is demonstrated.

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Bibliographic Details
Main Authors: Grutter, K. E., Grine, A., Myung-Ki Kim, Quack, N., Rocheleau, T., Nguyen, C. T-C, Wu, M. C.
Format: Conference Proceeding
Language:English
Subjects:
Integrated optics
Optical device fabrication
Optical fibers
Optical ring resonators
Online Access:Request full text
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Description
Summary:We present a new phosphosilicate glass photonic integrated circuit platform for optomechanical systems. Wafer-scale reflow enables high-Q (1.5×10 6 ) resonators and closely-spaced (250nm) waveguides. Optomechanical resonance (71.9MHz) is demonstrated.
ISSN:2160-8989
2160-9004
DOI:10.1364/CLEO_SI.2012.CW1M.5