Active Terahertz near-field probes for high-resolution free-carrier density imaging applications

First photo-conductive near-field probes combining THz generation, detection, transmission and resonant focusing element in a single micro-structured cantilever device are presented and applied to free-carrier density imaging applications in semiconductor (solar) material analytics.

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Bibliographic Details
Main Authors: Nagel, M., Safiei, A., Pletzer, T., Kurz, H.
Format: Conference Proceeding
Language:English
Subjects:
Imaging
Noise measurement
Probes
Resonant frequency
Semiconductor device measurement
Silicon
Transmission line measurements
Online Access:Request full text
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Description
Summary:First photo-conductive near-field probes combining THz generation, detection, transmission and resonant focusing element in a single micro-structured cantilever device are presented and applied to free-carrier density imaging applications in semiconductor (solar) material analytics.
ISSN:2162-2027
DOI:10.1109/IRMMW-THz.2012.6380311