SOI sensing technologies for harsh environment

This paper reviews and addresses certain aspects of Silicon-On-Insulator (SOI) technologies for a harsh environment. The paper first describes the need for specialized sensors in applications such as (i) domestic and other small-scale boilers, (ii) CO 2 Capture and Sequestration, (iii) oil & gas...

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Bibliographic Details
Main Authors: Udrea, F., Ali, S. Z., Brezeanu, M., Dumitru, V., Buiu, O., Poenaru, I., Chowdhury, M. F., De Luca, A., Gardner, J. W.
Format: Conference Proceeding
Language:English
Subjects:
Boilers
CMOS technology for sensing applications
Combustion
Gas detectors
MOSFETs
Silicon on Insulator (SOI)
System in Package (SiP)
Temperature measurement
Temperature sensors
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Summary:This paper reviews and addresses certain aspects of Silicon-On-Insulator (SOI) technologies for a harsh environment. The paper first describes the need for specialized sensors in applications such as (i) domestic and other small-scale boilers, (ii) CO 2 Capture and Sequestration, (iii) oil & gas storage and transportation, and (iv) automotive. We describe in brief the advantages and special features of SOI technology for sensing applications requiring temperatures in excess of the typical bulk silicon junction temperatures of 150 o C. Finally we present the concepts, structures and prototypes of simple and smart micro-hotplate and Infra Red (IR) based emitters for NDIR (Non Dispersive IR) gas sensors in harsh environments.
ISSN:1545-827X
2377-0678
DOI:10.1109/SMICND.2012.6400708