Piezoresistive pressure sensor with Ladder shape design of piezoresistor

In this study, a novel piezoresistor (PZR) design to improve the sensitivity of the piezoresistive type pressure sensor is reported. In this design, the PZR combined with various doping concentrations and doping depths is proposed and implemented. According to the design concept, the combined PZR wh...

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Bibliographic Details
Main Authors: Heng-Chung Chang, Hsieh-Shen Hsieh, Sung-Cheng Lo, Chih-Fan Hu, Weileun Fang
Format: Conference Proceeding
Language:English
Subjects:
Doping
Fabrication
Piezoresistance
Sensitivity
Shape
Silicon
Stress
Citations: Items that cite this one
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Summary:In this study, a novel piezoresistor (PZR) design to improve the sensitivity of the piezoresistive type pressure sensor is reported. In this design, the PZR combined with various doping concentrations and doping depths is proposed and implemented. According to the design concept, the combined PZR which includes multiple piezoresistance coefficients would be arranged in a unique shape, just like a ladder. Theoretically, the sensitivity improvement could boost up to 15% based on this PZR design, even under the conditions of membrane edge offset due to fabrication processes. As a result, the sensitivity of the pressure sensor which adopted the Ladder shape PZR design is 0.058 mV/V/kPa. Moreover, the doping profile of the Ladder shape PZR is also extracted by SIMS. The serial measurements successfully prove the feasibility of this design concept. In the future, the presented PZR design can be further extended to various piezoresistive sensors, such as accelerometer, gyro, etc.
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2012.6411323