Steady-state performance optimization for variable-gain motion control using extremum seeking

In this paper, we employ an extremum-seeking control strategy for steady-state performance optimization of variable-gain controllers for linear motion systems. Variable-gain control can balance the tradeoff between low-frequency disturbance suppression and sensitivity to high-frequency noise in a mo...

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Bibliographic Details
Main Authors: Hunnekens, B. G. B., Haring, M. A. M., v d Wouw, N., Nijmeijer, H.
Format: Conference Proceeding
Language:English
Subjects:
Force
Motion control
Noise
Optimization
Semiconductor device modeling
Steady-state
Tuning
Online Access:Request full text
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Summary:In this paper, we employ an extremum-seeking control strategy for steady-state performance optimization of variable-gain controllers for linear motion systems. Variable-gain control can balance the tradeoff between low-frequency disturbance suppression and sensitivity to high-frequency noise in a more desirable manner than linear controllers can. However, the optimal performance-based tuning of the variable-gain controller parameters is far from trivial. A model-based performance optimization method would require an accurate disturbance model, which may be hard to obtain in practice. The extremum-seeking controller proposed here does not require any plant- or disturbance model and therewith circumvents this difficulty. To illustrate the results, the variable-gain controller of a short-stroke wafer stage of a wafer scanner is optimized using extremum-seeking control.
ISSN:0191-2216
DOI:10.1109/CDC.2012.6426800