Flexible, zero powered, piezoelectric MEMS pressure sensor arrays for fish-like passive underwater sensing in marine vehicles

In an effort to improve the situational awareness of maritime vehicles, flexible MEMS pressure sensor arrays are developed for underwater sensing applications. This paper outlines the development of piezoelectric microdiaphragm pressure sensor arrays that can perform a passive fish-like underwater s...

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Bibliographic Details
Main Authors: Asadnia, M., Kottapalli, A. G. P., Shen, Z., Miao, J. M., Barbastathis, G., Triantafyllou, M. S.
Format: Conference Proceeding
Language:English
Subjects:
Detection
Electrodes
Fabrication
Marine animals
Mechanical systems
Microelectromechanical systems
Micromechanical devices
Piezoelectricity
Pressure sensors
Sensor arrays
Substrates
Underwater
Vehicles
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Description
Summary:In an effort to improve the situational awareness of maritime vehicles, flexible MEMS pressure sensor arrays are developed for underwater sensing applications. This paper outlines the development of piezoelectric microdiaphragm pressure sensor arrays that can perform a passive fish-like underwater sensing. Individual sensors have a low footprint of 1.8 × 1.8 mm 2 and do not require any power for their operation. An array of 2 by 5 sensors is fabricated, packaged and tested for use on marine vehicle. The proposed array is capable of locating underwater objects by transducing the pressure variations generated by the stimulus.
ISSN:1084-6999
DOI:10.1109/MEMSYS.2013.6474193