Introducing FCA, a new alloy for Power Systems on a chip and Wafer Level Magnetic applications

On chip integrated inductors and transformers require novel and improved materials and CMOS-compatible Wafer Level Magnetics (WLM) deposition techniques. In this work we are presenting an Fe-Co based amorphous magnetic alloy, called FCA that was specifically designed and developed by Enpirion to be...

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Bibliographic Details
Main Authors: Liakopoulos, T., Panda, A., Wilkowski, M., Lotfi, A., Tan, K. H., Li Zhang, Chiming Lai, Dong Chen
Format: Conference Proceeding
Language:English
Subjects:
Packaging
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Summary:On chip integrated inductors and transformers require novel and improved materials and CMOS-compatible Wafer Level Magnetics (WLM) deposition techniques. In this work we are presenting an Fe-Co based amorphous magnetic alloy, called FCA that was specifically designed and developed by Enpirion to be used for the first time in volume production for highly integrated and miniaturized power management electronics. The FCA properties that make it suitable for use in a real product are: stable permeability to frequencies higher than 20MHz, high electrical resistivity ρ>120 μΩ-cm, high magnetic saturation B s >1.5T, and ultra-low coercivity H c
DOI:10.1109/ICEPT-HDP.2012.6474765