Design and fabrication of sensor structures for the measurement of toxic gases

In this paper the direct growth of ZnO nanostructures onto a sensing device for benzene gas sensing is presented. This sensor consists in an alumina substrate with platinum interdigitated microelectrodes and a Pt heater. The nanostructure growth process is based on a vapor-liquid-solid method starti...

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Bibliographic Details
Main Authors: Gonzalez-Chavarri, J., Castro-Hurtado, I., Mandayo, G. G., Castano, E.
Format: Conference Proceeding
Language:English
Subjects:
benzene
Devices
Electrodes
Fabrication
gas sensor
Gas sensors
Heaters
Heating
Materials
Nanostructure
Nanostructures
Platinum
Sensing devices
Sensors
Surface morphology
Toxic
VLS
Zinc oxide
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Description
Summary:In this paper the direct growth of ZnO nanostructures onto a sensing device for benzene gas sensing is presented. This sensor consists in an alumina substrate with platinum interdigitated microelectrodes and a Pt heater. The nanostructure growth process is based on a vapor-liquid-solid method starting from a RF sputtered Zn thin film.
ISSN:2163-4971
2643-1300
DOI:10.1109/CDE.2013.6481354