Design and fabrication of sensor structures for the measurement of toxic gases

In this paper the direct growth of ZnO nanostructures onto a sensing device for benzene gas sensing is presented. This sensor consists in an alumina substrate with platinum interdigitated microelectrodes and a Pt heater. The nanostructure growth process is based on a vapor-liquid-solid method starti...

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Main Authors: Gonzalez-Chavarri, J., Castro-Hurtado, I., Mandayo, G. G., Castano, E.
Format: Conference Proceeding
Language:English
Subjects:
benzene
Devices
Electrodes
Fabrication
gas sensor
Gas sensors
Heaters
Heating
Materials
Nanostructure
Nanostructures
Platinum
Sensing devices
Sensors
Surface morphology
Toxic
VLS
Zinc oxide
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creator Gonzalez-Chavarri, J.
Castro-Hurtado, I.
Mandayo, G. G.
Castano, E.
description In this paper the direct growth of ZnO nanostructures onto a sensing device for benzene gas sensing is presented. This sensor consists in an alumina substrate with platinum interdigitated microelectrodes and a Pt heater. The nanostructure growth process is based on a vapor-liquid-solid method starting from a RF sputtered Zn thin film.
doi_str_mv 10.1109/CDE.2013.6481354
format conference_proceeding
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subjects benzene
Devices
Electrodes
Fabrication
gas sensor
Gas sensors
Heaters
Heating
Materials
Nanostructure
Nanostructures
Platinum
Sensing devices
Sensors
Surface morphology
Toxic
VLS
Zinc oxide
title Design and fabrication of sensor structures for the measurement of toxic gases
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