Fractal study for describing surface morphology from atomic forge microscopy images

Roughness profiles of various polysilicon surface were measured by atomic force microscopy. These profiles are analysed using fractal theory to illustrate the advantage of treating surface morphology from the fractal point of view.

Saved in:
Bibliographic Details
Main Authors: Flueraru, C., Nastase, S., Iovan, S.
Format: Conference Proceeding
Language:English
Subjects:
Atomic force microscopy
Atomic measurements
Force measurement
Fractals
Frequency
Rough surfaces
Surface morphology
Surface roughness
Surface topography
Surface treatment
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Roughness profiles of various polysilicon surface were measured by atomic force microscopy. These profiles are analysed using fractal theory to illustrate the advantage of treating surface morphology from the fractal point of view.
DOI:10.1109/SMICND.1997.651318